plasma parameter

Finally, a favorable BARC ( bottom-anti-reflected-coating) etch profile to reduce fencing defect is achieved through plasma parameter optimization based on model results.

模型和实验的结果表明：通过对等离子体刻蚀参数的优化可以产生一个能减少底部防反光层的围墙式缺陷的刻蚀剖面。

The vacuum vessel as an ultrahigh vacuum pressure vessel is one of the important components of the EAST device, providing high quality vacuum conditions for the plasma discharge, which will affect greatly all kinds of plasma parameter.

EAST真空室作为超高真空压力容器是EAST超导托卡马克核聚变实验装置的关键部件之一，是等离子体放电的直接场所，其获得的真空度质量直接影响装置运行时等离子体的各项基本物理参数。